Process for producing a semiconductor device

Details Process for producing a semiconductor device Process for producing a semiconductor device

2007-01-16

2007-01-16

Lee, Sin (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S325000, C430S326000, C430S270100, C430S910000

Reexamination Certificate

active

10937853

ABSTRACT:
According to the present invention, a resist resin having in its structure a specific bridged-bond-containing aliphatic ring, and a resist composition comprising the same are provided. By using this resist composition, a resist pattern excellent in both transparency against short-wavelength light and dry-etching resistance can be formed by alkali development with high resolution.

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