Process for producing a semiconductor

Details Process for producing a semiconductor Process for producing a semiconductor

1992-06-05

1994-05-17

Kight, III, John

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430314, 430317, 430323, 257642, 257759, G03C 500

Patent

active

053127161

ABSTRACT:
A process for producing a semiconductor having a thin film of a fluorine resin as a protective film, which comprises coating on the surface of a fluorine resin a photoresist solution containing a surfactant, followed by exposure, development and etching for fine processing of the fluorine resin.

REFERENCES:
patent: 5117272 (1992-05-01), Nomura et al.

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