Process for producing a metal organic polymer combination

Details Process for producing a metal organic polymer combination Process for producing a metal organic polymer combination

1993-05-13

1994-08-23

Niebling, John

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

204169, 427490, 427536, 427539, B01D 300

Patent

active

053404513

ABSTRACT:
A process is disclosed for producing a metal-organic polymer combination by contacting the polymer with a plasma followed by an aqueous solution of a metal salt. In one embodiment a water or nitrous oxide plasma is used to treat a polyimide or a fluorinated polymer. The polymer is combined with a metal cation, the metal being a catalyst for a conventional electroless coating after which it is contacted with an electroless metal plating bath for the formation of electrical circuits and especially for plating high aspect ratio vias in microcircuits. Unlike the conventional electroless process, the cationic catalytic metal is not reduced to a zero valent metal catalyst prior to the application of the electroless metal coating solution.
The process also improves the wettability of the polymer, especially the fluorinated polymer and is especially useful in improving the wettability of high aspect ratio vias.

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