Process for producing a doped semiconductor substrate

Details Process for producing a doped semiconductor substrate Process for producing a doped semiconductor substrate

2006-07-18

2006-07-18

Baumeister, B. William (Department: 2825)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

Diffusing a dopant

C438S308000, C438S309000, C438S521000, C438S529000, C438S582000, C438S586000

Reexamination Certificate

active

07078325

ABSTRACT:
A process is described which allows a buried, retrograde doping profile or a delta doping to be produced in a relatively simple and inexpensive way. The process uses individual process steps that are already used in the mass production of integrated circuits and accordingly can be configured for a high throughput.

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