Process for producing a developer having a low metal ion level

Details Process for producing a developer having a low metal ion level Process for producing a developer having a low metal ion level

1992-12-29

1994-02-15

Le, Hoa Van

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430314, 430323, 430327, 430331, G03C 5305

Patent

active

052866068

ABSTRACT:
The present invention provides a process for producing a developer containing a surfactant which contains a very low level of metal ions and a process for developing light sensitive photoresist compositions, using such a developer, to produce semiconductor devices.

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U.S. Ser. No. 07/809591, Dec. 1991, Rahman et al.
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U.S. Ser. No. 07/999500, Dec. 1992, Rahman et al.
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