Process for producing a ceramic layer

Details Process for producing a ceramic layer Process for producing a ceramic layer

1998-09-30

2000-12-05

Nelms, David

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

438681, 438789, 438790, 438793, 438794, 438 3, H01L 2131

Patent

active

06156673&

ABSTRACT:
A ceramic layer, in particular having ferroelectric, dielectric or superconducting properties, uses compounds with a simple structure as precursors and only methanoic acid, acetic acid or propionic acid and, where appropriate, water as solvent.

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"Microstructural Investigation of Acetate-Derived PLZT Films", Preston et al., Integrated Ferroelectrics, 1992, vol. 1, pp. 89-98.
International Patent Application WO 90/13149 (Sayer et al.), dated Nov. 1, 1990.
Timothy J. Boyle et al.: "Formation of SrBi2Ta209: Part I. Synthesis and characterization of a novel "sol-gel" solution for production of ferroelectric SrBi2Ta209 thin films", Journal of Materials Research, Sep. 1996, vol. 11, No. 9, pp. 2274-2281, XP-002090044.

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