Process for preparing soft magnetic film of Permalloy

Details Process for preparing soft magnetic film of Permalloy Process for preparing soft magnetic film of Permalloy

1986-09-12

1987-10-13

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, 204298, C23C 1400

Patent

active

046997024

ABSTRACT:
A process for preparing a soft magnetic film of Permalloy on a rugged substrate in an inert gas atmosphere by a multielectrode sputtering method wherein the target voltage and the target current are independently controllable, the Permalloy film being prepared by:

REFERENCES:
patent: 3361659 (1968-01-01), Berteisen
patent: 3625849 (1971-12-01), Rogalla
patent: 3716472 (1973-02-01), Kausche
patent: 4159909 (1979-07-01), Wilson
patent: 4484995 (1984-11-01), Pirich et al.
patent: 4487675 (1984-12-01), Meckel
Meckel et al, Research Disclosure; Oct.; 1979, pp. 537-540.

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