Process for obtaining multiple sheet resistances for thin film h

Details Process for obtaining multiple sheet resistances for thin film h Process for obtaining multiple sheet resistances for thin film h

1986-08-07

1989-01-31

Goldberg, E. A.

Coating processes

Electrical product produced

Resistor for current control

427102, 427123, 427125, 4271261, 29620, 338308, 338314, B05D 512, H01C 1706, H01C 1012

Patent

active

048014699

ABSTRACT:
A standard thin film circuit containing Ta.sub.2 N (100 ohms/square) resirs is fabricated by depositing on a dielectric substrate successive layers of Ta.sub.2 N, Ti and Pd, with a gold layer to provide conductors. The addition of a few simple photoprocessing steps to the standeard TFN manufacturing process enables the formation of Ta.sub.2 N+Ti (10 ohms/square) and Ta.sub.2 N+Ti+Pd (1 ohm/square) resistors in the same otherwise standard thin film circuit structure.

REFERENCES:
patent: 3458847 (1969-07-01), Waits
patent: 3594225 (1971-07-01), Waits
patent: 3864825 (1975-02-01), Holmes
patent: 3896284 (1975-07-01), Holmes
patent: 3996551 (1976-12-01), Croson

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