Process for manufacturing silicon-germanium alloys

Details Process for manufacturing silicon-germanium alloys Process for manufacturing silicon-germanium alloys

1988-04-20

1989-08-15

Rutledge, L. Dewayne

Alloys or metallic compositions

Silicon base alloy containing metal

148 336, 148DIG59, 156613, 420556, 437110, 437131, C23C 1414

Patent

active

048572705

ABSTRACT:
A process for manufacturing a silicon-germanium alloy comprising introducing SiH.sub.4 gas, GeCl.sub.4 gas and P-type or N-type doping gas into a reaction vessel, heating a substrate up to a temperature not lower than 750.degree. C., and depositing a thickly-grown, bulky silicon-germanium alloy upon the substrate within the reaction vessel.

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Halberg et al., "Silicon Germaniun Alloy . . . ", Chem. Ab. 97:137724m, vol. 97, p. 722, 1982.

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