Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Patent
1997-02-21
1999-11-02
Picardat, Kevin M.
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
438 14, 438 18, G01R 3126, H01L 2166
Patent
active
059769017
ABSTRACT:
The invention relates to a process for manufacturing semiconductor devices with active device structures which are connected with one another in a wafer, the area of a semiconductor device being determined by process parameters and being substantially greater than the area of an active device structure. An improvement of the process is achieved by forming several like active device structures on each of the semiconductor devices.
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Collins D. M.
General Semiconductor Inc.
Picardat Kevin M.
Plevy Arthur L.
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