Process for manufacturing semiconductor devices with active stru

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed

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438 14, 438 18, G01R 3126, H01L 2166

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active

059769017

ABSTRACT:
The invention relates to a process for manufacturing semiconductor devices with active device structures which are connected with one another in a wafer, the area of a semiconductor device being determined by process parameters and being substantially greater than the area of an active device structure. An improvement of the process is achieved by forming several like active device structures on each of the semiconductor devices.

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