Process for manufacturing semiconductor device and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S288000

Reexamination Certificate

active

07087945

ABSTRACT:
A process for manufacturing a semiconductor device comprising the steps of: forming a transparent film on a semiconductor substrate including a photoelectric conversion section, the transparent film having a concave portion above the photoelectric conversion section; forming a material film on the transparent film, the material film being made of a photosensitive material having a refractive index higher than that of the transparent film; and irradiating selectively a predetermined portion of the material film with rays, and then developing the material film, whereby forming an intralayer lens having a convex portion facing into the concave portion.

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patent: 5796154 (1998-08-01), Sano et al.
patent: 5877040 (1999-03-01), Park et al.
patent: 6255640 (2001-07-01), Endo et al.
patent: 6504188 (2003-01-01), Maruyama et al.
patent: 6903395 (2005-06-01), Nakai et al.
patent: 04-012568 (1992-01-01), None
patent: 11-087672 (1999-03-01), None

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