Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1996-04-01
1998-07-21
McPherson, John A.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
430320, 430945, 264 25, 264107, 216 24, 216 66, G11B 726
Patent
active
057833710
ABSTRACT:
A process for manufacturing an optical data storage disk stamper includes the steps of providing an amorphous electroless nickel substrate including phosphorous in the amount in a range of about 5 to 15 percent by weight having a toughness of about 100 MPa.sqroot. m, a roughness in a range of about 1 to 50 nm, and a flatness of about 6 .mu.m and depositing a negative photoresist on a surface of the substrate. The substrate has a diameter greater than about 120 mm and a thickness greater than about 300 .mu.m. The negative photoresist then is exposed with a laser to form a negative, data pattern in the photoresist. The photoresist is developed, and the ceramic substrate is ion machined to form the data pattern, in the substrate, such that a spiral track of ridges and lands is formed wherein each ridge has a height of less than about 150 nm. After the data pattern has been ion machined into the substrate, the developed photoresist is stripped from the substrate.
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Ciriello Peter
McPherson John A.
Trustees of Boston University
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