Process for manufacturing integrated optical components using si

Details Process for manufacturing integrated optical components using si Process for manufacturing integrated optical components using si

1992-09-10

1994-01-25

Thomas, Tom

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

252 791, 156643, 156646, 156667, 156638, 65 3013, 134 3, H01L 2100

Patent

active

052813037

ABSTRACT:
A process for the production of an integrated optical circuit in a glass body by ion exchange between certain regions of the glass body and a metallic salt with the use of a mask defining the regions where the ion exchange occurs, wherein the mask comprises a layer of silicon and the mask is removed by an etching operation preceded by a cleansing operation.

REFERENCES:
patent: 3575746 (1971-04-01), Cheskis et al.
patent: 3843228 (1974-10-01), Yoshiyagawa et al.
patent: 3857689 (1974-12-01), Koizumi et al.
patent: 4528010 (1985-07-01), Edahiro et al.
patent: 4750799 (1988-06-01), Kawachi et al.
"Realization of Schmidt Plates by Ion Exchange in Glass", J. L. Coutaz et al., Applied Optics, vol. 21, No. 6, Mar. 15, 1982, pp. 1066-1068.
"Fabrication and Performance of Low Loss Optical Components Made by Ion Exchange in Glass", A. Beguin et al., Journ. of Lightwave Tech., vol. 6, No. 10, Oct. 1988, pp. 1483-1487.
"Integrated Optical Waveguiding Structures Made by Silver Ion-Exchange in Glass. 2: Directional Coupler and Bends", R. G. Walker et al., Applied Optics, vol. 22, No. 12, Jun. 15, 1983, pp. 1929-1936.
"Index Profiles of Multimode Optical Strip Waveguides by Field-Enhanced Ion Exchange in Glasses", H. J. Lilienhof et al., Optics Comm., vol. 35, No. 1, Oct. 1980, pp. 49-53.
"Field-Induced Index Profiles of Multimode Ion-Exchanged Strip Waveguides", H. J. Lilienhof et al., IEEE Journ. of Quantum Elects., vol. QE-18, No. 11, Nov. 1982, pp. 1877-1883.

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