Coating processes – Electrical product produced – Superconductor
Patent
1992-02-24
1994-04-26
King, Roy
Coating processes
Electrical product produced
Superconductor
427 63, 505832, 505846, 505817, 156656, 324248, 257 31, H01L 3924, G01R 33035
Patent
active
053065212
ABSTRACT:
A method of manufacturing a DC superconducting quantum interference device comprises forming an insulating film over a portion of a resistance film. A lower electrode superconducting film is formed over the resistance film and the insulating film. A barrier layer is formed on a portion of the lower electrode superconducting film. An upper electrode is formed sandwiching the barrier layer between the lower electrode superconducting film and the upper electrode, so as to form a Josephson junction. To reduce the number of manufacturing steps, the lower electrode superconducting film is photolithographically patterned and/or etched to simultaneously form an input coil, a feedback coil and the Josephson junction. In another embodiment, after forming the upper electrode, an insulating film is formed over at least a portion of the lower electrode superconducting film. A superconducting film is formed over the insulating film in contact with the upper electrode. To reduce the number of manufacturing steps, the superconducting film is photolithographically patterned and/or etched to simultaneously form a counter electrode, the input coil and the feedback coil.
REFERENCES:
patent: 5053834 (1991-10-01), Simmonds
patent: 5142229 (1992-08-01), Marsden
Ketchen, et al., "Ultra-low-noise tunnel junction dc Squid with a tightly coupled planar input coil", Applied Physics Letters, vol. 40, No. 8, Apr. 15, 1982, pp. 736-738.
Cantor, et al., "Integrated DC Squid magnetometer with simplified read-out", Superconductor Science & Technology, vol. 3, No. 2, Feb., 1990, pp. 108-112.
Chiba Norio
Chinone Kazuo
Shimizu Nobuhiro
Adams Bruce I.
King Roy
Seiko Instruments Inc.
Wilks Van C.
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