Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2007-11-13
2007-11-13
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S422000, C438S967000, C257SE21561
Reexamination Certificate
active
10327702
ABSTRACT:
A process for manufacturing an SOI wafer, including the steps of: forming, in a wafer of semiconductor material, cavities delimiting structures of semiconductor material; thinning out the structures through a thermal process; and completely oxidizing the structures.
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Barlocchi Gabriele
Corona Pietro
Villa Flavio
Graybeal Jackson Haley LLP
Isaac Stanetta
Janeway John M.
Lebentritt Michael
STMicroelectronics S.R.L.
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