Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1996-05-21
1999-05-25
Graybill, David
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438615, 22818022, H01L 21283, H01L 2160
Patent
active
059077867
ABSTRACT:
A method of producing a packaged semiconductor integrated circuit including hardened resin packaging and a polished electrode including producing external electrodes on a wafer including an IC chip employing photolithography in a process for producing an IC chip; depositing and hardening resin on the wafer; polishing the wafer to clean the external electrodes; and cutting the wafer and separating the resulting chips from the wafer, thereby producing a flip-chip package.
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Microelectronics Packaging Handbook; New York, Van Nostrand Reinhold, pp. 380, 828-829 and 833-834. TK7874.T824, 1988.
Graybill David
Mitsubishi Denki & Kabushiki Kaisha
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