Process for making bipolar having graded or modulated collector

Details Process for making bipolar having graded or modulated collector Process for making bipolar having graded or modulated collector

1997-06-09

1999-12-14

Fahmy, Wael M.

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

Self-aligned

438202, 438234, 438369, 438527, 148DIG9, 148DIG10, 148DIG11, 257370, 257588, H01L 21331

Patent

active

060017015

ABSTRACT:
A bipolar fabrication process, illustratively suited for integration into a conventional CMOS process to thereby form a BiCMOS integrated circuits is disclosed. The collector and base are formed through multiple implants and a single masking step to thereby provide a continuous low resistance collector region.

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