Process for making a photoactive compound and photoresist theref

Details Process for making a photoactive compound and photoresist theref Process for making a photoactive compound and photoresist theref

1998-02-02

1999-08-10

Powers, Fiona T.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

C07C30976, C07C30328, G03F 722

Patent

active

059360712

ABSTRACT:
The present invention provides for process of preparing a photoactive ester compound of high purity using a solid base catalyst, preferably an anionic exchange resin. The invention further provides for preparing and imaging a photosensitive composition comprising such a photoactive compound, a film-forming resin and a solvent composition.

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