Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-05-01
2007-05-01
Smith, Bradley K. (Department: 2891)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S093000, C438S102000, C438S057000, C257S184000
Reexamination Certificate
active
10491938
ABSTRACT:
A process for large-scale production of CdTe/CdS thin film solar cells, films of the cells being deposited, in sequence, on a transparent substrate, the sequence comprising the steps of: depositing a film of a transparent conductive oxide (TCO) on the substrate; depositing a film of CdS on the TCO film; depositing a film of CdTe on the CdS film; treating the CdTe film with CdCl2; depositing a back-contact film on the treated CdTe film. Treatment of the CdTe film with CdCl2comprises the steps of: forming a layer of CdCl2on the CdTe film by evaporation, while maintaining the substrate at room temperature; annealing the CdCl2layer in a vacuum chamber at a temperature generally within a range of 380° C. and 420° C. and a pressure generally within a range of 300 mbar and 1000 mbar in an inert gas atmosphere; removing the inert gas from the chamber so as to produce a vacuum condition, while the substrate is kept at a temperature generally within a range of 350° C. and 420° C. whereby any residual CdCl2is evaporated from the CdTe film surface.
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Romeo, N. et al., “A highly efficient and stable CdTe/CdS thin film solar cell”,Solar Energy Materials And Solar Cells, Elsevier Science Publishers, Amsterdam, The Netherlands, vol. 58, No. 2, Jun. 1999, pp. 209-218, XP004177956, ISSN: 0927-0248.
Bosio Alessio
Romeo Alessandro
Romeo Nicola
Pollack P.C.
Smith Bradley K.
Solar Systems & Equipments S.r.l.
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