Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1997-05-03
2000-07-18
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
4272497, 427122, 427902, 427904, H05H 124, C23C 1626
Patent
active
060904569
ABSTRACT:
A new method for ion beam deposition of diamond-like carbon coatings onto a variety of substrates is described. A high power, radio frequency excited-inductively coupled ion gun directs a beam of carbon and hydrogen ions at a substrate inside an ultra vacuum deposition chamber. A four axis scanner is used for coating large and nonplaner substrates. A quadrupole mass spectrometer is mounted inside the deposition chamber for real time monitoring of ion composition. The disclosed method is particularly effective for coating zinc sulfide and zinc selenide infrared windows.
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L. Wang et al, J. Appl. Phys. 79(8) pp. 5776-578, Apr. 1996.
D. Swec et al, NASA Technical Memorandum 10211 "Diamondlike Carbon Protective Coatings for Optical Windows" p. 1-16, Mar. 1989.
Bletzinger Peter
Lanter William C.
Wu Richard L.C.
King Roy V.
Kundert Thomas L.
Sinder Fredric L.
The United States of America as represented by the Secretary of
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