Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1993-05-18
1994-06-21
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
4272551, 4272481, 427314, 427124, C23C 1600
Patent
active
053227123
ABSTRACT:
Chemical Vapor Deposition of copper films is enhanced by simultaneously introducing in the reactor vapor of an organometallic copper precursor and copper complex vapor of a volatile ligand or the hydrate of the ligand.
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Hochberg Arthur K.
Norman John A. T.
Roberts David A.
Air Products and Chemicals Inc.
King Roy V.
Marsh William F.
Simmons James C.
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