Process for growing a thin metallic film

Details Process for growing a thin metallic film Process for growing a thin metallic film

1991-03-07

1994-05-31

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Metal coating

4272551, 427282, C23C 1604, C23C 1606

Patent

active

053167961

ABSTRACT:
A chemical vapor deposition process for growing a thin metallic film of copper or gold on a substrate includes providing a starting material composed of a .beta.-ketonato type metal complex of gold or copper in a heated container; preparing a carrier gas for the starting material which is composed of hydrogen as a reducing agent and at least one electron donating substance which bonds to and forms a molecular compound with the starting material by donating an electron to the starting material; passing a flow of the carrier gas through the heated container containing the starting material to form the molecular compound in situ and provide a flow of a gas mixture; introducing the flow of the gas mixture into a reaction chamber in which a substrate is positioned; and growing gold or copper on the substrate by thermally decomposing the molecular compound and any remaining starting material under temperature conditions effective therefor.

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