Process for generation of acid and for imaging, and imaging medi

Details Process for generation of acid and for imaging, and imaging medi Process for generation of acid and for imaging, and imaging medi

1993-10-22

1995-03-07

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430269, 430347, G03C 1494, G03C 1492, G03C 176

Patent

active

053957369

ABSTRACT:
Acid can be generated by exposing a superacid precursor to actinic radiation effective to generate superacid from the superacid precursor and heating the superacid in admixture with a secondary acid generator capable of undergoing thermal decomposition to produce a secondary acid. The superacid catalyzes decomposition of the secondary acid generator, thus increasing the quantity of strong acid present in the medium. The resultant secondary acid can be used to effect a color change in an acid-sensitive material, so providing an imaging process.

REFERENCES:
patent: 3915706 (1975-10-01), Limburg et al.
patent: 3932514 (1976-01-01), Thelen et al.
patent: 4092146 (1978-05-01), Fischer et al.
patent: 4159387 (1979-06-01), Bellus
patent: 4345017 (1982-08-01), Cournoyer et al.
patent: 4602263 (1986-07-01), Borrer et al.
patent: 4720449 (1988-01-01), Borrer et al.
patent: 4826976 (1989-05-01), Borrer et al.
patent: 4916046 (1990-04-01), Doessel
patent: 4992571 (1991-02-01), Fukuyama et al.
patent: 5084371 (1992-01-01), Schwalm et al.
patent: 5102771 (1992-04-01), Vogel et al.
patent: 5141969 (1992-08-01), Saeva et al.
Berry et al., Chemically Amplified Resists for I-line and G-line Applications, SPIE 1262, 575 (1990).
Bou et al., Tetrahedron Letters, 23(3), 361 (1982).
Cohen S. and Cohen, S. G., J. Am. Chem. Soc., 88, 1533 (1966).
Dehmlow et al., Chem. Ber. 113(1), 1-8 (1979).
Dehmlow et al., Chem. Ber. 121(3), 569-71 (1988).
Islam, N. et al., Tetrahedron 43, 959-970 (1987).
Pericas et al., Tetrahedron Letters, (1977), 4437-38.
Reichmanis et al., Chemical Amplification Mechanism for Microlithography, Chem. Mater., 3(3), 394 (1991).

Affiliated with

Also associated with

Rating

Process for generation of acid and for imaging, and imaging medi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for generation of acid and for imaging, and imaging medi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for generation of acid and for imaging, and imaging medi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1405328