Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-12-18
1994-01-04
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156656, 156904, B44C 122, C23F 100
Patent
active
052756955
ABSTRACT:
Improved processes for generating a structure having beveled edges are presented. In a preferred embodiment, two photoresist layers are successively deposited on top of the target material, e.g., a metallization film. The intermediate photoresist layer is developed beyond the lithographically delineated boundaries of the top photoresist layer, forming deep recesses. These recesses remain unchanged during the subsequent etching step, resulting in pre-defined edge profiles in the target material.
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Chang Lucas S.
Eldridge Jerome M.
Hwang Cherngye
Lee James H.
Wang Tiee-Ghow
Chang Lucas S.
International Business Machines - Corporation
Powell William A.
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