Process for forming protective film of organic polymer and boron

Details Process for forming protective film of organic polymer and boron Process for forming protective film of organic polymer and boron

1984-11-15

1986-12-16

Williams, Howard S.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C23C 1412, C23C 1418

Patent

active

046295470

ABSTRACT:
A protective film having a very low coefficient of friction, a good wear resistance, a good adhesion, and prolonged lubricating and moisture-resistant properties is formed on a substrate by sputtering of a target consisting of at least one of organic polymers and at least one of boron compounds.

REFERENCES:
patent: 3583899 (1971-06-01), Aronson
patent: 4390601 (1983-06-01), Ono et al.
patent: 4525417 (1985-06-01), Dimigen et al.

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