Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1990-04-30
1993-07-20
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430313, 430324, 430394, G03C 500
Patent
active
052292576
ABSTRACT:
Disclosed is a process for producing multi-level conductor/insulator films on a processed semiconductor substrate having a conductor pattern. The insulator layers, each comprise a photosensitive polyimide polymer composition, and this allows the desired wiring channels and stud vias to be formed directly in the insulator layers, without the use of separate masking layers and resulting image transfer steps, thus providing a less cumbersome and costly process.
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Chiu, G. T., et al., "Process For Multilayer Metal Technology," IBM Tech. Discl. Bull., vol. 25, No. 10 (Mar. 1983) pp. 5309-5314.
Pfeifer, J., et al., "Direct Photoimaging of Fully Imidized Solvent-Soluble Polyimides", Second International Conference on Polyimides, Mid-Hudson Section SPE, Ellenville, N.Y. (Oct. 30-Nov. 1, 1985), pp. 130-150.
Cronin John E.
Kaanta Carter W.
Lee Pei-Ing P.
Previti-Kelly Rosemary A.
Ryan James G.
Duda Kathleen
International Business Machines - Corporation
McCamish Marion E.
Sabo William D.
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