Process for forming microcircuits

Details Process for forming microcircuits Process for forming microcircuits

1980-03-03

1981-09-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156657, 1566591, 204192E, 427341, 430 5, 430313, 430317, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

042895731

ABSTRACT:
The resistance of a resist of plasma etching is enhanced by first cross-linking the resist and then contacting it with an aqueous solution of NaOH or KOH. The process is useful to form microcircuits having increased density of geometry.

REFERENCES:
patent: 4078102 (1978-03-01), Bendz et al.
patent: 4093461 (1978-06-01), Loprest et al.
patent: 4208211 (1980-06-01), Bowden

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