Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-04-16
1985-08-13
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
29576W, 29580, 148187, 156643, 156648, 156653, 156662, 357 47, H01L 21306, B44C 122, C03C 1500, C03C 2506
Patent
active
045348243
ABSTRACT:
A process for forming isolation slots having immunity to surface inversion comprises the steps of defining a slot region in a semiconductor substrate, implanting dopants in the substrate adjacent the mouth of the slot which have conductivity types appropriate to counteract inversion across the filled slot, applying a spacer layer over the exposed surface of the layers defining the slot and over the substrate, etching the spacer layer to leave spacers only along the edges of the materials defining the slots and etching the substrate to form the slots.
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Advanced Micro Devices , Inc.
Haynes Mark A.
King Patrick T.
Powell William A.
Valet Eugene H.
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