Process for forming gate silicon oxide film for MOS transistors

Details Process for forming gate silicon oxide film for MOS transistors Process for forming gate silicon oxide film for MOS transistors

1993-12-23

1996-04-09

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437946, H01L 2128, H01L 21324

Patent

active

055061788

ABSTRACT:
A process for forming a silicon oxide film comprising:

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