Fishing – trapping – and vermin destroying
Patent
1993-03-01
1994-10-25
Kunemund, Robert
Fishing, trapping, and vermin destroying
437194, 437245, 437246, H01L 2144
Patent
active
053589017
ABSTRACT:
The present invention includes a process for forming an intermetallic layer and a device formed by the process. The process includes a reaction step where a metal-containing layer reacts with a metal-containing gas, wherein the metals of the layer and gas are different. In one embodiment of the present invention, titanium aluminide may be formed on the sides of an interconnect. The process may be performed in a variety of equipment, such as a furnace, a rapid thermal processor, a plasma etcher, and a sputter deposition machine. The reaction to form the intermetallic layer is typically performed while the substrate is at a temperature no more than 700 degrees Celsius.
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Filipiak Stanley M.
Fiordalice Robert W.
Kawasaki Hisao
Olowolafe Johnson O.
Chang Joni Y.
Kunemund Robert
Meyer George R.
Motorola Inc.
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