Process for forming a master mold for optical storage disks

Details Process for forming a master mold for optical storage disks Process for forming a master mold for optical storage disks

1986-12-24

1988-02-09

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 1566591, 20419237, 430321, 430323, B44C 122, C03C 1500, C03C 2506

Patent

active

047240431

ABSTRACT:
A method for forming a master mold for optical storage disks includes thermally growing an oxide or nitride layer on a semiconductor wafer. The thermally grown layer is then coated with a photoresist. The photoresist is exposed to a laser beam to form a data pattern and developed. The oxide or nitride under the developed pattern is etched and the photoresist stripped to provide a semiconductor master mold for optical disks.

REFERENCES:
patent: 4125427 (1978-11-01), Chen et al.
patent: 4180432 (1979-12-01), Clark
patent: 4259433 (1981-03-01), Mizobuchi et al.
patent: 4350561 (1982-09-01), Little
patent: 4512848 (1985-04-01), Deckman et al.

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