Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1990-09-04
1991-07-02
Nguyen, Nam X
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419217, 20419231, 427 38, 2504923, C23C 1434
Patent
active
050283065
ABSTRACT:
A ceramic article is treated to increase the adhesion of metals to the ceramic article by placing the ceramic article under at least a partial vacuum. A thin film of metal is then deposited on the ceramic article by sputtering or evaporating. The metallized ceramic article is further bombarded by high energy ions, resulting in the formation of a metal-ceramic compound that renders the article more receptive to further metal deposition.
REFERENCES:
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patent: 4302498 (1981-11-01), Faith, Jr.
patent: 4629631 (1986-12-01), Dearnaley
patent: 4793908 (1988-12-01), Scott et al.
patent: 4855026 (1989-08-01), Sioshansi
patent: 4874493 (1989-10-01), Pam
Davis James L.
Garza Ernest G.
Motorola Inc.
Nguyen Nam X
Nichols Daniel K.
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