Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2005-09-20
2005-09-20
Chea, Thorl (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C313S314000, C313S327000
Reexamination Certificate
active
06946238
ABSTRACT:
A method for manufacturing an optical waveguide device in accordance with the present invention includes the steps of depositing a lower cladding layer; coating a photoresist layer directly on the lower cladding layer; patterning the photoresist layer to create channels; depositing a core layer, wherein a first portion of the core layer is deposited inside the channels and a second portion overlays the patterned photoresist layer; removing the patterned photoresist layer and the second portions of the core layer overlaying the patterned photoresist layer; and depositing an upper cladding layer.
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Gates Brian J.
Koch Barry J.
Larsen Jeremy K.
Smith Terry L.
Zhang Jun-Ying
3M Innovative Properties Company
Chea Thorl
Rosenblatt Gregg H.
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