Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-09-14
1989-07-18
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156644, 156648, 156651, 156655, B44C 122, C03C 1500, C03C 2506
Patent
active
048490709
ABSTRACT:
A sublimable layer is deposited on a substrate, holes are etched through sublimable layer, a thin-layer structure is deposited on portions of the remaining sublimable layer, and a thick structural support material is deposited to cover the sides and bottoms of the holes and portions of the thin-layer structure. When the sublimable layer is sublimed with the heat, photon enhancement (ultraviolet light) and oxygen purging, a structure is left which consists of a thin layer or layers supported by posts above a substrate.
REFERENCES:
patent: 3539705 (1970-11-01), Nathanson et al.
patent: 3846166 (1974-11-01), Saiki et al.
patent: 4262399 (1981-04-01), Cady
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4740410 (1988-04-01), Muller et al.
patent: 4783237 (1988-11-01), Aine et al.
Bly Vincent T.
Bradford Alan P.
Cox J. Thomas
Dunn Aubrey J.
Lane Anthony T.
Lee Milton W.
Powell William A.
The United States of America as represented by the Secretary of
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