Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2006-08-01
2006-08-01
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S330000, C430S394000
Reexamination Certificate
active
07083902
ABSTRACT:
The present invention relates to process for fabricating supersphere solid immersion lens (SSIL). The procedure of the present invention comprises the steps of: firstly, coating a positive photoresist layer on a substrate, followed by first exposure and second exposure with different exposure dose separately by first mask and second mask to form the positive photoresist structure with different dimensions and depths. The first exposure dose is supplied enough to make sure the patterns of the first mask can be observed on the positive photoresist layer during the alignment of the second exposure process. And the following reflow process forms a supersphere solid immersion lens (SSIL) structure.
REFERENCES:
patent: 11-048354 (1999-01-01), None
H. Lorenz et al.; “Fabrication of Photoplastic High-Aspect Ratio Microparts and Micromolds Using SU-8 UV Resist”;Microsystem Technologies 4; pp. 143-146; 1998.
Yuh-Sheng Lin et al.; “Polymide as the Pedestal of Batch Fabricated Micro-ball Lens and Micro-Mushroom Array”;Micro Electro Mechanical Systems,; MEMS 2001; The 14th IEEE International Conference Jan. 21-25, 2001; pp. 337-340.
Youngjoo Yee et al.; “Micro Solid Immersion Lens Fabricated by Micro-Molding For Near-Field Optical Data Storate”;Optical MEMS, 2000IEEE/LEOS International Conference, Aug. 21-24, 2000; pp. 91-92.
Hsu Wensyang
Sun Yi-Ting
McPherson John A.
National Chiao Tung University
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