Process for fabricating strain gage transducer

Details Process for fabricating strain gage transducer Process for fabricating strain gage transducer

1978-05-18

1980-02-12

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29610SG, 156656, 156657, 338 2, 357 67, 357 71, H01L 21306, C23F 102

Patent

active

041882580

ABSTRACT:
A transducer which includes a metal strain gage material formed on a flexible monocrystalline silicon diaphragm is disclosed. The transducer is fabricated to a large extent with semiconductor processing steps. Gold is diffused into a platinum-tungsten gage material. This allows the gage material to be chemically etched in the presence of other metals to define the active gage resistors. In the presently preferred embodiment, these resistors are formed over thin areas of the diaphragm to provide increased linearity and sensitivity.

REFERENCES:
patent: 3341794 (1967-09-01), Stedman
patent: 3629022 (1971-12-01), Terry
patent: 3858150 (1974-12-01), Gurtler

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