Process for fabricating silicon carbide films with a predetermin

Details Process for fabricating silicon carbide films with a predetermin Process for fabricating silicon carbide films with a predetermin

1990-12-20

1992-11-10

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427249, 4272552, 427314, B05D 306

Patent

active

051621339

ABSTRACT:
The present invention relates to a process for fabricating silicon carbide films and membranes with a predetermined stress via control of the deposition parameters which comprises the following steps:

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