Process for fabricating piezoelectric element

Details Process for fabricating piezoelectric element Process for fabricating piezoelectric element

2011-08-30

2011-08-30

Tugbang, A Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100

Reexamination Certificate

active

08006357

ABSTRACT:
In a production method of a piezoelectric element, an unneeded electric field is prevented from being applied to a piezoelectric thin film layer during the production process, resulting in a high performance piezoelectric element production method. The production method includes a first process for depositing an under electrode layer, a piezoelectric thin film layer and an upper electrode layer successively on a substrate such that the under electrode layer and the upper electrode layer form a short-circuit, a second process, after the first process, for etching including dry etching, the second process commenced while the under electrode layer and the upper electrode layer are short-circuited, a third process, after the second process, for polarizing by applying a voltage across the under electrode layer and the upper electrode layer, a fourth process, after the third process, for individualizing each piezoelectric element.

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International Search Report for application No. PCT/JP2006/302619 dated Apr. 18, 2006.

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