4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Kazuki Komaki

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Infrared detector element, and infrared sensor unit and...

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate

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Method and apparatus for fabrication of dielectric film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method and apparatus for fabrication of dielectric thin film

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Process for fabricating piezoelectric element

Metal working – Piezoelectric device making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1922191

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