Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1984-11-13
1986-01-14
Brown, J. Travis
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430317, 430318, 430320, 430323, 430329, 156643, 1566591, G03C 500
Patent
active
045645850
ABSTRACT:
A process for fabricating a negative pressure slider is disclosed which briefly comprises the steps of: (a) applying a dry negative photoresist layer to the surface of the slider; (b) positioning a mask having alignment marks which are too narrow to be resolved during exposure and development to pattern the photoresist layer to expose the portions of the flying surface of the slider to be milled by an ion milling process; (c) ion milling the slider wherein the patterned photoresist layer protects the flying surface of the slider while the negative pressure cavities of the slider are being milled; and (d) removing the remaining portions of the photoresist layer once the negative pressure cavities have been milled.
REFERENCES:
patent: 4052603 (1977-10-01), Karlson
patent: 4375390 (1983-03-01), Anderson et al.
Hitchner et al., IBM Technical Disclosure Bulletin, vol. 24, No. 2, Jul. 1981, p. 995.
Nakanishi et al., IEEE Transactions on Magnetics, vol. Mag-16, No. 5, Sep. 1980, pp. 785-787.
Gloersen, Solid State Technology, Apr. 1976, pp. 68-73.
Blaske Paul S.
Calderon Arthur
Longworth Leroy L.
Zimmerman Larry D.
Brown J. Travis
Genovese Joseph A.
Magnetic Peripherals Inc.
Schwarz Edward L.
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