Process for fabricating integrated optics

Details Process for fabricating integrated optics Process for fabricating integrated optics

1983-11-03

1985-05-14

Smith, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

1566591, 427162, G03C 500

Patent

active

045172803

ABSTRACT:
A process for making a diffraction grating pattern on a substrate is disclosed. The process comprises the steps of coating the substrate with first and second materials, with one of the materials defining a selected area for the diffraction grating pattern, and the other material covering the substrate while forming a window at that portion of the substrate where the diffraction grating is desired. The window portion of the substrate is then etched, and the first and second materials are stripped off in order to leave behind the diffraction grating pattern at the desired location of the substrate.

REFERENCES:
patent: 3961102 (1976-06-01), Ballantyne
patent: 4203649 (1980-05-01), Velasco
patent: 4241109 (1980-12-01), Johnson
patent: 4321282 (1982-03-01), Johnson
patent: 4393126 (1983-07-01), Kojima
patent: 4426440 (1984-01-01), Thompson
Heflinger "Submicron Grating Fabrication on GaAs by Holographic Exposure", Optical Engineering, vol. 21, No. 3, pp. 537-541, 5(1982).

Affiliated with

Also associated with

Rating

Process for fabricating integrated optics does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for fabricating integrated optics, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for fabricating integrated optics will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-768724