Process for fabricating glass tooling

Details Process for fabricating glass tooling Process for fabricating glass tooling

1985-04-15

1986-12-30

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430323, 430331, 430495, 430942, 156643, 156646, 156652, 1566591, G03C 500

Patent

active

046328980

ABSTRACT:
The present disclosure relates to a process for fabricating glass tooling with a featured surface. The method entails the steps of coating a polished surface of a glass blank with a continuous metal coating. A photoresist is applied, exposed, and developed in a desired pattern. Uncovered metal is etched away and the remaining metal provides a mask. The uncovered glass is plasma etched to feature the surface of the glass blank.

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patent: 3794536 (1974-02-01), Muska
patent: 3957609 (1976-05-01), Sasano et al.
patent: 4275091 (1981-06-01), Lippits et al.
patent: 4374077 (1983-02-01), Kerfeld
patent: 4421593 (1983-12-01), Curtis et al.
patent: 4444869 (1984-04-01), Chonan et al.
patent: 4556628 (1985-12-01), Greschner et al.
IBM Technical Disclosure Bulletin, vol. 13, No. 2, Jul. 1970, p. 394, P. P. Castrucci et al., "Chrome Mask Fabrication by RF Sputter Etch".
Review of the Electrical Communication Laboratories, vol. 32, No. 2, "Properties of Injection-Molded Plastic Substrates for Laser Beam Memory".

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