Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-06-20
2006-06-20
Geyer, Scott (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S584000, C438S700000
Reexamination Certificate
active
07064053
ABSTRACT:
A process for fabricating an integrated electrical circuit comprises the formation and then the removal of conducting inserts. Components of the electrical circuit are incorporated into insulating materials superposed on top of a substrate. The process makes it possible to provide an exclusion volume around certain components sensitive to electrostatic coupling, while giving each insulating material a planar surface at the end of a polishing step.
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Gayet Philippe
Inard Alain
Kordic Srdjan
Roussel Céline
Geyer Scott
Koninklijke Philips Electronics , N.V.
STMicroelectronics SA
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