Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1984-11-26
1988-06-14
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20419226, 20419232, 20419234, 20419235, 156643, 156646, 156667, C23C 1434
Patent
active
047509791
ABSTRACT:
The present invention provides a method of preparing the surface of a lithium niobate substrate (10) having titanium optical waveguides (12) for a subsequent deposition of a coating material such as electrodes. This cleaning or etching step prior to the deposit of desired coating materials is accomplished without deterioration of the transmission capacities of the optical waveguides (12). The substrate cleaning step of the present invention comprises the introduction of a predetermined amount of oxygen (16) at a controlled rate to provide a predetermined atmospheric environment surrounding the lithium niobate substrate (10). The subsequent etching of the substrate surface to a predetermined depth, for example, by argon ion bombardment, provides minimal damage to the optical waveguides while still producing an excellently cleaned surface preparatory for receiving subsequent layer depositions such as the electrodes.
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Garvin Hugh L.
Gee Caroline M.
Duraiswamy V. D.
Hughes Aircraft Company
Karambelas A. W.
Laslo V. G.
Nguyen Nam X.
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