Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1977-06-30
1978-08-15
Massie, Jerome W.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156644, 156647, 156661, 156667, 204192R, 252 792, 346140R, 427383R, 427383B, 427404, C23F 100, G01D 1518
Patent
active
041069757
ABSTRACT:
A method for etching at least one aperture having a defined crystallographic geometry in single crystals which includes masking the crystal to protect predetermined portions thereof from being etched, and then anisotropically etching with a mixture of sulfuric acid and phosphoric acid.
REFERENCES:
patent: 3042566 (1962-07-01), Hardy
patent: 3823408 (1974-07-01), Gordon
patent: 4007464 (1977-02-01), Bassous et al.
patent: 4008111 (1977-02-01), Rutz
Reisman et al., "The Chemical Polishing of Sapphire and MgAl Spinel" Journal of Electrochemical Society vol. 118, No. 10 (Oct. 1971) pp. 1653-1657.
Berkenblit Melvin
Chan See Ark
Reisman Arnold
Zirinsky Stanley
International Business Machines - Corporation
Massie Jerome W.
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