Process for etching

Details Process for etching Process for etching

1991-02-20

1992-05-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156656, 156657, 1566591, 156345, 20419237, 252 791, 437233, 437245, H01L 21306, B44C 122, C23F 102, C03C 1500

Patent

active

051104083

ABSTRACT:
The present invention relates to the etching of a gate film, a tungsten film, a silicon film, etc. In the present invention, use is made of an etching gas comprising a mixture composed of a reductive fluoride gas, a hydrocarbon gas and a halogen gas having a larger atomic diameter than a material to be etched, or a mixture composed of a reductive fluoride gas and a Cl-containing hydrocarbon gas, and the process comprises the step of conducting anisotropic etching of a material to be etched with an etching gas (a reductive fluoride gas), the step of forming a protective film by a depositing gas (a hydrocarbon gas), and the step of removing excess deposits formed as the protective film by means of a gas reactive with the protective film (a halogen gas or a Cl-containing hydrogen gas), wherein anisotropic etching is conducted by forming a protective film on a side wall while removing excess deposits formed as the protective film, thus enabling the anisotropic etching to be conducted with good accuracy.

REFERENCES:
patent: 4473435 (1984-09-01), Zaffropoulo et al.
patent: 4713141 (1987-12-01), Tsang
patent: 4741799 (1988-05-01), Chen et al.

Affiliated with

Also associated with

Rating

Process for etching does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for etching, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for etching will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1410051