Process for depositing wear-resistant coatings

Details Process for depositing wear-resistant coatings Process for depositing wear-resistant coatings

1993-06-10

1994-01-18

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

2041921, 427249, 4272552, 4272553, 427294, 427576, 427577, 427579, B05D 306

Patent

active

052798666

ABSTRACT:
A process for depositing on a sample surface a smooth, wear-resistant coating including the steps of providing a vacuum processing chamber for holding the sample to be coated, introducing into the processing chamber coating-forming reactants for deposition on the sample surface, and supplying to the processing chamber a plasma stream with an electron temperature of up to 10 eV, a directed ion energy of 5 to 50 eV, and an ion flux at the sample in the range of 0.1 to 100 milliamps per square centimeter for transferring energy to the deposited material to form the smooth coating.

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