Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-06-20
1989-06-13
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156648, 156652, 156655, 1566591, 156668, 20419236, 437228, 437235, B44C 122, B29C 3700, C03C 1500, C03C 2506
Patent
active
048389919
ABSTRACT:
A conformal organic layer is used to define spacers on the sidewalls of an organic mandrel. The organic layer (e.g., parylene) can be deposited at low temperatures, and as such is compatible with temperature-sensitive mandrel materials that reflow at high deposition temperatures. The conformal organic material can be dry etched as the same rate as the organic mandrels, while being resistant to wet strip solvents that remove the organic mandrels. This series of etch characteristics make the organic mandrel-organic spacer combination compatible with a host of masking applications.
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"Advanced Groundrule Processing Performed with Currently Available Photo-Lithographic Tools," IBM Technical Disclosure Bulletin, vol. 29, No. 9, Feb. 1987, pp. 3928-3929.
"Self-Aligned VMOS Structure Using Reactive Ion Etching," R. C. Varshney, IBM TDB, vol. 22, No. 8B, Jan. 1980, pp. 3705-3706.
Cote William J.
Kenney Donald M.
Kerbaugh Michael L.
Leach Michael A.
Robinson Jeffrey A.
Chadurjian Mark F.
International Business Machines - Corporation
Powell William A.
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