Process for connecting an optical element of a...

Details Process for connecting an optical element of a... Process for connecting an optical element of a...

2006-03-21

2009-06-23

Hasan, Mohammed (Department: 2873)

Optical: systems and elements

Lens

With support

C359S820000

Reexamination Certificate

active

07551375

ABSTRACT:
The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.

REFERENCES:
patent: 3839780 (1974-10-01), Freedman et al.
patent: 4726507 (1988-02-01), Landram
patent: 4863090 (1989-09-01), Lippey
patent: 6392824 (2002-05-01), Holderer et al.
patent: 6768600 (2004-07-01), Dieker
patent: DD 107 892 (1974-08-01), None
patent: 197 35 760 (1999-02-01), None
patent: 11 02 032 (2001-03-01), None
patent: 0253561 (1988-01-01), None

Affiliated with

Also associated with

Rating

Process for connecting an optical element of a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for connecting an optical element of a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for connecting an optical element of a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4121084