Process for coating a substrate with metallic layer

Details Process for coating a substrate with metallic layer Process for coating a substrate with metallic layer

1991-09-19

1994-12-13

Niebling, John

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, 20419217, C23C 1434

Patent

active

053726855

ABSTRACT:
A metallic layer is coated onto a substrate by sputtering a layer of chromium followed by a layer of copper whereby the temperature of the substrate is at least about 320.degree. C.

REFERENCES:
patent: 4342632 (1982-08-01), Heim et al.
patent: 4351704 (1982-09-01), Kurihara
patent: 4386116 (1983-05-01), Nair et al.
patent: 4517051 (1985-05-01), Gazdik et al.
patent: 4629662 (1986-12-01), Brownlow et al.

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